Micro-XRF Can Measure the Smallest Features

Micro XRF Capable of Measuring Smallest Features Bowman has made a significant addition to its range of precision XRF instruments used in the PCB, semiconductor and microelectronics industries. The Bowman A Series Micro XRF can rapidly measure the smallest features in semiconductors and microelectronics. This encompasses large PCB panels and wafers of any size for complete sample coverage and multi-point programmable automation. [caption id="attachment_141735" align="aligncenter"] Graphical rendering of the A Series for integration with an automated wafer handler[/caption] Polycapillary optics focus the X-ray beam to 7.5 µm FWHM, the world's smallest for XRF coating thickness analysis. A camera with 140X magnification measures features at this scale; a secondary, lower-magnification camera provides live sample viewing and macro overview imaging. Bowman's proprietary dual-camera system allows operators to view the entire part, click on the image to zoom in with the high-mag camera, and rapidly identify the feature of interest. A programmable X-Y stage with 23.6 inch (600 mm) travel in each direction can handle the largest samples in the industry. The stage has precision down to +/- 1 µm on each axis and is used to select and measure multiple points; Bowman's pattern recognition software and autofocus features accomplish this automatically as well. The system's 3D mapping capability can be used to image the topography of ENIG, ENEPIG, EPIG and other elite processes. A Series instruments include a molybdenum target tube (chromium and tungsten also available) with 7.5 µm optics and a high-resolution, large-window Silicon Drift Detector (SDD) processing more than 2 million counts per second. SDDs are the industry standard for complex thin films. High count rate capability is key to achieving a low minimum detection limit (MDL) and the highest spectral resolution. A Series systems are distinguished by their cleanroom readiness, possession of the largest semiconductor stage travel on the market, and global support by a service network providing same-day response for all desktop XRF requirements. Equipment evaluation, selection, commissioning, maintenance and modernization are available for users of Bowman instruments and other major XRF brands.   SOURCE